共路激光干涉测量系统的研究

激光干涉测量系统在精密测量领域占有重要地位，它对温度变化、大气变化、激光波长变化、机械安装误差和外界振动等比较敏感，影响系统的测量精度和稳定性。针对此情况，该文提出一种新型的激光干涉光路，两光臂呈完全共路结构，使干涉条纹信号具有极强的抗干扰能力；对光路进行抗干扰分析和理论推导；构建位移测量系统，进行系统测试实验和误差分析。实验表明，本系统测量分辨力0.72nm，合成标准不确定度5．2nm（k=2），运行速度0．56mm／s，量程0．01mm。

Research in common path laser interference measurement system

Laser interference instrument is very important in precision measurement field. La;er interference instrument is sensitive to temperature changes, pressure changes, laser wavelength changes, mechanical installation error and vibration form outside. All these factors have negative effects on measurement accuracy and stability. To deal with this problem, come up with a new laser interference optical design. The two optical arms have the same path, which make the interference fringe signal resist disturbance very well. Establish displacement measurement system and do testing experiments. The experiment results prove that the system with this optical design has the displacement resolution of 0.72 nm, combined standard uncertainty of 5.21 nm, range of 0.01mm and highest velocity of 0.56 mm/s.