表面张力作用下抗粘附的微齿轮结构设计原理研究

粘附是微机械中最常见的一种失效现象,一般的微机械结构都极力避免粘附的出现．表面张力是引起微结构粘附的最主要原因．深入研究了表面张力作用下使构件产生粘附的物理机理．以多晶硅微齿轮为例,考虑其在表面张力作用下发生的粘附现象,推导出表面张力作用下抗粘附多晶硅微齿轮结构参数设计公式．结果表明,微齿轮产生粘附与材料特性（弹性特性、表面特性）、微齿轮结构参数（半径、齿宽）、微齿轮与基体之间的间隙有关．

Research on structural design principle of anti-adhesion micro-gear under surface tension

Adhesion is the most common failure in micro-machine, and general micro-machines all try to avoid it. Surface tension is the most crucial reason causing adhesion. Deep research on physical principles of adhesion under surface tension was carried out. By taking polycrystalline silicon as an instance and considering its adhesion under surface tension, structure parameter design formula of anti-adhesion polycrystalline silicon micro-gear under surface tension was derived. The results show that the generation of adhesion of micro-gear has relation with material characteristics (elasticity, surface properties), micro-gear's structural parameters (radius, tooth width) and the gap between micro-gear and basic body．