|
|||||
|
|
Fabrication and testing of sputtered-sliced kinoform style Fresnel zone plate |
|
| Authors: | Shigeharu Tamura Masato Yasumoto Nagao Kamijo Akihisa Takeuchi Yasuko Terada |
| Affiliation: | a AIST Kansai, National Institute of Advanced Industrial Science and Technology (AIST), Ikeda, Osaka 563-8577, Japan b AIST Tsukuba Central 2, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan c Kansai Medical University, Uyama-Higashi, Hirakata, Osaka 573-1136, Japan d Japan Synchrotron Radiation Research Institute (SPring-8), Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan |
| Abstract: | The Fresnel zone plate (FZP) is a type of lens for focusing X-rays. We have fabricated a kinoform style FZP with a 30-step structure composed of concentric multilayer of alternating Cu layer, Al layer, and 28 composite material (Cu, Al) layers. The multilayer was deposited using a magnetron sputtering apparatus with two DC-sputtering guns. The focusing characteristics were evaluated at the synchrotron radiation beamline of SPring-8, and the focused beam size measured by knife-edge scanning was 0.8 μm at 40 keV. The peak diffraction efficiencies measured using ion chambers for 1st- and 2nd-order diffraction were 42% and 12% at 40 keV and 20 keV, respectively. High-order X-ray diffraction was also examined using the data obtained from a CCD camera. |
| Keywords: | Zone plate Multilayer zone plate Kinoform zone plate Diffraction efficiency Sputtering X-ray |
| 本文献已被 ScienceDirect 等数据库收录！ | |