| 扫描探针显微镜在粗糙度、纳米尺寸、表面形貌观测方面的应用 |
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| 引用本文： | 游俊富,王虎,赵海山.扫描探针显微镜在粗糙度、纳米尺寸、表面形貌观测方面的应用[J].理化检验(物理分册),2003,39(3):146-150. |
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| 作者姓名： | 游俊富 王虎 赵海山 |
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| 作者单位： | 中国上海测试中心,上海,200233 |
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| 摘 要： | 扫描探针显微镜是近十几年来在表面特征、表面形貌观测方面最重大的进展之一，是纳米测量学的基本工具。叙述了扫描探针显微镜的工作原理、检测模式及在观察检测纳米级的粗糙度、微小尺寸、表面形貌方面的特点和方法，比较了原子力显微镜、常规的表面轮廓仪、干涉显微镜、扫描电子显微镜在表面特性、表面形貌观测方面的性能，着重介绍了扫描探针显微镜在粗糙度、纳米尺寸、表面形貌观测方面的应用和存在的问题。
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| 关 键 词： | 观测 扫描探针显微镜 粗糙度 表面形貌 纳米尺寸 工作原理 |
| 文章编号： | 1001-4012(2003)03-0146-05 |
| 修稿时间： | 2002年8月13日 |
THE APPLICATION OF SCANNING PROBE MICROSCOPE IN OBSERVING AND DETERMINING THE ROUGHNESS, NANO-SCALED SIZE AND SURFACE TOPOGRAPHY |
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| YOU Jun fu,WANG Hu,ZHAO Hai shan.THE APPLICATION OF SCANNING PROBE MICROSCOPE IN OBSERVING AND DETERMINING THE ROUGHNESS, NANO-SCALED SIZE AND SURFACE TOPOGRAPHY[J].Physical Testing and Chemical Analysis Part A:Physical Testing,2003,39(3):146-150. |
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| Authors: | YOU Jun fu WANG Hu ZHAO Hai shan |
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| Abstract: | The scanning probe microscope is one of the most important developments on observing and determining surface topography and surface properties in near ten years and is basic tool of nano-measurement.The principles,measuring modes,features and determination methods for observing and determining the roughness, nano-scale size and surface topography by SPM are described. The properties on observing and determining surface topography and surface properties of atomic force microscope, stylus-type roughness gauge, interferometer and scanning electron microscope are compared. The application and present problems of SPM in observing and determining the roughness, micro or nanoscale size and surface topography are particularly introduced. |
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| Keywords: | Scanning probe microscopy Roughness Surface topography Nano scaled size |
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