TiO2薄膜的液相沉积法制备及其性能表征

采用液相沉积法（ＬＰＤ）制备了透明ＴｉＯ２薄膜，并研究了所制薄膜的形貌，结构和在紫外光照射下亲水性能的变化。结果表明，用此法制得的ＴｉＯ２薄膜较为均匀致密，热处理前后的薄膜具有相似的亲水性能，在紫外光照射下亲水性能都有提高。热处理后的薄膜在紫外光照射一定时间后可与水完全润湿。

Preparation of TiO2 Thin Films by Liquid Phase Deposition Methods and their Properties

nansparent TiO₂ thin films were prepared by a liquid phase deposition method. The morphology, structure and the change of hydrophilicities under UV illumination of as-prepared films were studied. The result shows that thus prepared films axe dense and uniform, and exhibit a similar hydrophilicity whether the films are annealed or not. Their hydrophilicities are all increased by UV illumination. The films annealed can be entirely wetted by water after UV illumination for a certain time.