| Ba0.9Sr0.1TiO3薄膜的椭偏光谱研究 |
| |
| 引用本文： | 阳生红,李辉遒,张曰理,莫党,田虎永,罗维根,蒲兴华,丁爱丽.Ba0.9Sr0.1TiO3薄膜的椭偏光谱研究[J].无机材料学报,2001,16(2):305-310. |
| |
| 作者姓名： | 阳生红 李辉遒 张曰理 莫党 田虎永 罗维根 蒲兴华 丁爱丽 |
| |
| 作者单位： | [1]中山大学物理系，广州510275 [2]中国科学院上海硅酸盐研究所无机功能开放实验室，上海200050 |
| |
| 摘 要： | 用椭偏光谱仪首次在光子能量为2．1－5．2eV的范围内，测量了不同热处理温度下Ba0.9Sr0.1TiO3(BST)薄膜的椭偏光谱。建立适当的拟合模型，并用Cauchy色散模型描述BST薄膜的光学性质，用最优化法获得了所用样品的光学常数（折射率n和消光系数k）谱及禁带能Eg比较这些结果，初步得到了BST薄膜的折射率n、消光系数k和禁带能Eg随退火温度变化的变化规律。
|
| 关 键 词： | 椭偏光谱 光学常数谱 BST薄膜 陶瓷薄膜 光学性质 |
| 文章编号： | 1000-324X(2001)02-0305-06 |
| 收稿时间： | 2000-4-4 |
| 修稿时间： | 2000年4月4日 |
Spectroscopic Ellipsometry Studies of Ba0.9Sr0.1Ti03 Thin Films |
| |
| YANG Sheng-Hong,LI Hui-Qiu,ZHANG Yue-Li,MO Dang,TIAN Hu-Yong,LUO Wei-Gen,PU Xing-Hua,DING Al-Li.Spectroscopic Ellipsometry Studies of Ba0.9Sr0.1Ti03 Thin Films[J].Journal of Inorganic Materials,2001,16(2):305-310. |
| |
| Authors: | YANG Sheng-Hong LI Hui-Qiu ZHANG Yue-Li MO Dang TIAN Hu-Yong LUO Wei-Gen PU Xing-Hua DING Al-Li |
| |
| Affiliation: | 1.DepartmentofPhysics;ZhongshanUniversity;Guangzhou510275;China;2.LaboratoryofFunctionalInorganicMaterials;ChineseAcademyofScience,Shanghai200050,China |
| |
| Abstract: | Ellipsometric spectra of Ba0.9Sr0.1TiO3 (BST) thin films with various annealing temperatures were measured in the range of photon energy from 2.1 to 5.2eV. Constructing appropriate fitting models and describing optical properties of the BST with Cauchy dispersion model, their optical constants (refractive index n and extinction coefficient k) spectra and band gap Eg were determined by means of an optimization. Compared these results, we obtained the variation of the refractive index n, the extinction coefficient k and the band gap Eg with annealing temperatures. |
| |
| Keywords: | spectroscopic ellipsometry optical constant spectra BST films |
| 本文献已被 维普 等数据库收录！ |
| 点击此处可从《无机材料学报》浏览原始摘要信息 |
|
点击此处可从《无机材料学报》下载全文 |
