| 一种低温共烧AlN陶瓷基片的排胶技术 |
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| 引用本文： | 吴音,周和平,刘耀诚,缪卫国.一种低温共烧AlN陶瓷基片的排胶技术[J].无机材料学报,1998,13(3):396-400. |
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| 作者姓名： | 吴音 周和平 刘耀诚 缪卫国 |
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| 作者单位： | 清华大学材料科学与工程系新型陶瓷与精细工艺国家重点实验室; 北京100084 |
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| 基金项目： | 国家自然科学基金!69391201-2 |
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| 摘 要： | 介绍一种由高热导率AlN陶瓷和金属W共烧制备低温AlN陶瓷基片的排胶技术．研究了排胶过程中残余碳对AlN陶瓷基片相组成、烧结特性和微观结构的影响．结果表明：两步排胶法可以较好地解决W氧化及AlN陶瓷颗粒表面吸附残余碳的问题．
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| 关 键 词： | AlN陶瓷 低温共烧 排胶 残余碳 |
| 收稿时间： | 1997-6-11 |
| 修稿时间： | 1997-7-2 |
A Technique of Burn-out for Low Temperature Cofired AlN Multilayer Substrates |
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| WU Yin,ZHOU He-Ping,LIU Yan-Cheng,MIAO Wei-Guo.A Technique of Burn-out for Low Temperature Cofired AlN Multilayer Substrates[J].Journal of Inorganic Materials,1998,13(3):396-400. |
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| Authors: | WU Yin ZHOU He-Ping LIU Yan-Cheng MIAO Wei-Guo |
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| Affiliation: | State Key Laboratory of New Ceramics and fine Precessing; Dept. of Materials Science and Engineering; Tsinghua University Beijing 100084 China |
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| Abstract: | A technique of burn-out for low temperature cofired AlN multilayer substrates was introduced,which consist of high thermal conductivity AlN ceramics and metal W. The effect of the evolutionof carbon during burn-out on AlN sintering characteristics and microstructure was studied. Theresults showed that two-step burn-out process may solve the contradiction between W oxidationand residual carbon. |
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| Keywords: | aluminium nitride low temperature cofire binder burn-out residual carbon |
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