| 应用于MEMS的PZT铁电薄膜 |
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| 引用本文： | 于晓,张之圣,胡明.应用于MEMS的PZT铁电薄膜[J].无机材料学报,2005,20(1):27-32. |
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| 作者姓名： | 于晓 张之圣 胡明 |
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| 作者单位： | 天津大学电子信息工程学院, 天津 300072 |
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| 摘 要： | 薄膜制备工艺的发展使铁电薄膜很好的应用于MEMS, 使两者集成成为可能. 本文将详细论述铁电薄膜的优良性能, 及其与MEMS集成的关键工艺--图形化. 最后, 举例论述了PZT铁电薄膜在MEMS中的应用.
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| 关 键 词： | MEMS 铁电薄膜 PZT 微细加工技术 图形化 |
| 文章编号： | 1000-324X(2005)01-0027-06 |
| 收稿时间： | 2003-12-29 |
| 修稿时间： | 2004-3-19 |
PZT Ferroelectrics Thin Films Used in MEMS |
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| YU Xiao,ZHANG Zhi-Sheng,HU Ming.PZT Ferroelectrics Thin Films Used in MEMS[J].Journal of Inorganic Materials,2005,20(1):27-32. |
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| Authors: | YU Xiao ZHANG Zhi-Sheng HU Ming |
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| Affiliation: | School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, China |
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| Abstract: | With the development of thin film fabrication processes, there are many ferroelectrics thin films applied in MEMS. The fabrication of MEMS devices using ferroelectrics thin films depends upon the ability to pattern the films. The useful properties of ferroelectrics thin films, especially PZT thin films, were introduced, and some examples about the MEMS based on the ferroelectrics thin films were discussed. |
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| Keywords: | MEMS ferroelectrics thin films PZT micro fabrication pattern |
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