Transparent conducting Al and Y codoped ZnO thin film deposited by DC sputtering |
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| Authors: | Yu-Zen Tsai Na-Fu Wang Mei-Rurng Tseng Feng-Hao Hsu |
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| Affiliation: | 1. Department of Electronic Engineering, Cheng Shiu University, 840 Chengcing Rd., Niaosong Township, Kaohsiung, 83347 Taiwan, ROC;2. Material and Chemical Research Laboratories, Industrial Technology Research Institute, 31040 Taiwan, ROC |
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| Abstract: | Transparent conducting Al and Y codoped zinc oxide (AZOY) thin films with high transparency and low resistivity were deposited by DC magnetron sputtering. The effects of substrate temperature on the structural, electrical and optical properties of AZOY thin films deposited on glass substrates have been investigated. X-ray diffraction spectra indicate that no diffraction peak of Al2O3 or Y2O3 except that of ZnO (0 0 2) is observed. The AZOY thin film prepared at substrate temperature of 250 °C has the optimal crystal quality inferring from FWHM of ZnO (0 0 2) diffraction peak, but the AZOY thin film deposited at 300 °C has the lowest resistivity of 3.6 × 10−4 Ω-cm, the highest mobility of 30.7 cm2 V−1 s−1 and the highest carrier concentration of 5.6 × 1020 cm−3. The films obtained have disorderly polyhedral surface morphology indicating possible application in thin film solar cell with good quality and high haze factor without the need of post-deposition etching. |
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| Keywords: | Zinc oxide Thin films Sputtering Electrical properties |
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