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不同测试条件下TiN薄膜的摩擦学特性研究
引用本文:谢红梅,聂朝胤.不同测试条件下TiN薄膜的摩擦学特性研究[J].真空,2009,46(4).
作者姓名:谢红梅  聂朝胤
作者单位:西南大学材料科学与工程学院,重庆,400715
基金项目:重庆市科技攻关项目,教育部留学回国人员科研启动基金 
摘    要:采用电弧离子镀技术在45#钢衬底表面沉积了TiN薄膜.用显微硬度计测试了薄膜的硬度,用球一盘式摩擦磨损试验机评价了在不同测试条件下(干摩擦,水润滑,油润滑)TiN薄膜的摩擦学性能,用表面轮廓仪测试了磨痕处的磨痕轮廓,用配有能谱仪(EDS)的扫描电镜(SEM)观察和测试了磨痕形貌和磨痕处主要化学元素组成.结果表明,相对于干摩擦,水润滑和油润滑条件下,TiN薄膜的摩擦系数和磨痕深度都有明显降低的趋势.干摩擦条件下,薄膜表现为磨粒磨损和氧化磨损;水润滑条件下,薄膜表现为疲劳磨损,水对薄膜起到边界润滑作用;油润滑条件下,薄膜几乎无磨损,油起到流体润滑作用.

关 键 词:TiN薄膜  摩擦学特性  不同测试条件

Tribological properties of TiN films under different testing conditions
XIE Hong-mei,NIE Chao-yin.Tribological properties of TiN films under different testing conditions[J].Vacuum,2009,46(4).
Authors:XIE Hong-mei  NIE Chao-yin
Abstract:TiN films were deposited on #45 steel substrate with the process of are discharge deposition,and micro indentation tests were performed to measure the surface hardness of the films.Their tribological properties were investigated under different testing conditions,including the dry-state and water/oil lubricating-state on a ball-disk wearing tester.Moreover,an SEM with EDS and profilograph were employed to characterize the morphology and chemical composition of grinding cracks and their profiles on the surface of those films.The results showed that both the grinding crack depth and friction coefficitent of TiN films clearly tend to decrease under water/oil lubricating conditions in comparison with that under dry friction.It was verified that the films present the abrasive and oxidized wear under dry friction,the fatigue wear with water's boundary lubrication under water lubricating condition and the rare wear because of oil's fluidic lubricability under oil lubricating condition.
Keywords:TiN films  tribological properties  different testing conditions
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