等离子体的Langmuir探针诊断及数值滤波

Ｌａｎｇｍｕｉｒ探针是诊断等离子体荷粒子参数的重要手段。本文首次报道了用加热的调谐探针，在抑制了对探针的射频干扰和“中毒效应”之后，对探针Ｉ－Ｖ曲线的统计涨落噪声进行了数字滤波的光滑化处理，获得了射频辉光放电硅烷等离子体的电子能量分布函数，平均能量和浓度等重要参数。

Diagnostic of Plasma by Langmuir Probe and its Numerical Filter

Langmuir probe is an important method for diagnostic of the charged particle parameters. This paper reports that a tuned and heated Langmuir probe was used to restrain radio frequency(rf) interference and contamination effect of the probe, and the electron energy distribution function(EEDF), mean electron and electron concentrations in rf glow discharge plasma in argon and silane were first obtained by means of numerical filter for eliminating the statistics noise and smoothing the I V characteristic curve of the probe.