| 真空器件排气玻璃封接工艺研究 |
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| 引用本文： | 马迎英,程焰林,王远,马明旺,罗先君.真空器件排气玻璃封接工艺研究[J].真空,2011,48(5). |
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| 作者姓名： | 马迎英 程焰林 王远 马明旺 罗先君 |
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| 作者单位： | 中国工程物理研究院电子工程研究所,四川绵阳,621900 |
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| 摘 要： | 本文通过对真空器件排气玻璃封接工作中所见玻璃不透明现象的分析,结合反复工艺试验和相关资料,逐一提出了具体有效的解决方法、规避手段或减少(小)措施.通过高倍光学显微镜对比分析改进前后的封接效果,进一步证明解决方法有效,基本解决了文中所述的异常问题,给真空器件的科研生产工作提供了有力保障.
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| 关 键 词： | 不透明 烧制 解决 |
On the glass sealing process for the production of vacuum devices |
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| MA Ying-ying,CHENG Yan-lin,WANG Yuan,MA ming-wang,LUO Xian-jun.On the glass sealing process for the production of vacuum devices[J].Vacuum,2011,48(5). |
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| Authors: | MA Ying-ying CHENG Yan-lin WANG Yuan MA ming-wang LUO Xian-jun |
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| Affiliation: | MA Ying-ying,CHENG Yan-lin,WANG Yuan,MA ming-wang,LUO Xian-jun(Institute of Electronic Engineering CAEP,Mianyang 621900,China) |
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| Abstract: | From analyzing the glass opacity phenomenon appeared during the glass sealing process for production of vacuum devices with repeated tests and related informations,the concrete and effective solutions were put forward one by one.Through comparing the sealing effects before and after improvement by high optical microscope,the solutions were further proved to be effective,which provide a strong guarantee for the research and production of vacuum devices. |
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| Keywords: | opacity sintering solution |
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