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| PECVD法制备类金刚石薄膜的结构和摩擦学性能研究 | |
| 引用本文： | 常海波,徐洮,李红轩,张治军,刘惠文.PECVD法制备类金刚石薄膜的结构和摩擦学性能研究[J].真空,2006,43(1):47-50. |
| 作者姓名： | 常海波 徐洮 李红轩 张治军 刘惠文 |
| 作者单位： | 1. 河南大学化学化工学院,河南,开封,475001 2. 中国科学院兰州化学物理研究所固体润滑国家实验室,甘肃,兰州,730000 3. 河南大学特种功能材料实验室,河南,开封,4750001 |
| 摘 要： | 采用射频一直流等离子体增强化学气相沉积技术在单晶硅衬底上沉积了类金刚石薄膜。用激光拉曼光谱仪和原子力显微镜对薄膜的结构和表面形貌进行了表征，并用纳米压痕仪测定了薄膜的硬度。用UMT微摩擦磨损试验机考察了薄膜在不同的滑行速度下薄膜的摩擦学性能。结果表明：所沉积的薄膜具有典型类金刚石薄膜的结构特征，薄膜表面光滑致密，硬度较高；薄膜与氧化铝陶瓷球对磨显示出良好的摩擦学性能，随着滑行速度的增加，薄膜的摩擦系数单调降低，但磨损寿命先增加后降低。 |
| 关 键 词： | 类金刚石薄膜 结构 摩擦学性能 |
| 文章编号： | 1002-0322（2006）01-0047-04 |
| 收稿时间： | 2005-04-07 |
| 修稿时间： | 2005-04-07 |
Study on microstructure and tribological properties of diamond-like carbon films deposited by PECVD |
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| CHANG Hai-bo,XU Tao,LI Hong-xuan,ZHANG Zhi-jun,LIU Hui-wen.Study on microstructure and tribological properties of diamond-like carbon films deposited by PECVD[J].Vacuum,2006,43(1):47-50. | |
| Authors: | CHANG Hai-bo XU Tao LI Hong-xuan ZHANG Zhi-jun LIU Hui-wen |
| Affiliation: | 1. Chemistry and Chemical Engineering College of Henan University,Kaifeng 475001, China ; 2. State Key Laboratory of Solid Lubrication ,Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China; 3. Laboratory of Special Functional Materials, Henan University, Kaifeng 475001, China |
| Abstract: | Diamond-like carbon(DLC) films were prepared on the single crystal silicon substrate by way of DC-RFPECVD.The microstructure and morphology of the films were investigated by Raman spectroscopy,infrared spectroscopy and atomic force microscopy.The hardness of the film was determined with a nano-indenter.The tribological behavior of the DLC films sliding against an Al_2O_3 ball was investigated at different sliding velocities on UMT.The results indicated that the film deposited by DC-RFPECVD has typical diamond-like characteristics,smooth surface and high hardness.Moreover,the film showed good friction-reducing and anti-wear behavior against Al_2O_3 ball.With the increasing sliding velocity,the friction coefficient decreases monotonically,but the anti-wear life initially increases and then decreases. |
| Keywords: | PECVD |
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