| ZnO薄膜的晶体性能的分析 |
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| 引用本文： | 李剑光,汪雷,叶志镇.ZnO薄膜的晶体性能的分析[J].真空科学与技术学报,1999,19(5). |
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| 作者姓名： | 李剑光 汪雷 叶志镇 |
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| 作者单位： | 浙江大学硅材料国家重点实验室!杭州310027 |
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| 摘 要： | 在硅基上制备出了c轴取向高度一致的ZnO薄膜 ,这将有可能成为新型GaN单晶薄膜的过渡层。对ZnO薄膜的晶体性能进行了分析 ,研究不同衬底和不同衬底温度对ZnO薄膜的结晶状况的影响 ,并着重用TEM研究了硅基ZnO薄膜的晶体性能。
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| 关 键 词： | ZnO 晶体 性能 过渡层 |
Crystal Characterization of Zinc Oxide Thin Film |
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| Li Jianguang,Wang Lei,Ye Zhizhen,Zhao Binhui,Yuan Jun.Crystal Characterization of Zinc Oxide Thin Film[J].JOurnal of Vacuum Science and Technology,1999,19(5). |
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| Authors: | Li Jianguang Wang Lei Ye Zhizhen Zhao Binhui Yuan Jun |
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| Abstract: | Highly c axis oriented zinc oxide thin film was grown on Si substrates by magnetron sputtering.The films can possibly be used as an effective buffer layer in GaN film growth.The crystal structures of the ZnO films were studied with transmission electron microscopy and the influence of substrate temperatures and the properties of different substrates were also studied to optimize the growth of quality ZnO films. |
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| Keywords: | ZnO Crystal Property Buffer layer |
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