| 真空镀膜机双轴磁性液体密封的设计与实验研究 |
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| 引用本文： | 邢斐斐,李德才.真空镀膜机双轴磁性液体密封的设计与实验研究[J].真空科学与技术学报,2011,31(3):362-367. |
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| 作者姓名： | 邢斐斐 李德才 |
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| 作者单位： | 北京交通大学机械与电子控制工程学院,北京,100044 |
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| 基金项目： | 北京科委项目，国家自然科学基金项目 |
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| 摘 要： | 为了解决真空镀膜机双轴密封问题,对真空镀膜机双轴采用磁性液体密封,设计了磁性液体密封整体结构、密封极齿和永久磁铁。分析了双轴磁性液体密封的设计。还使用Ansys软件计算了双轴磁性液体密封的磁场分布。在实验上对所设计加工的双轴磁性液体密封进行了实验研究,得出了磁性液体密封耐压能力与加注磁性液体量的关系。
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| 关 键 词： | 磁性液体 密封 镀膜机 机械设计 |
Improvement of Magnetic Fluid Sealing of Film Depositors with Double Shafts |
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| Xing Feifei,Li Decai.Improvement of Magnetic Fluid Sealing of Film Depositors with Double Shafts[J].JOurnal of Vacuum Science and Technology,2011,31(3):362-367. |
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| Authors: | Xing Feifei Li Decai |
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| Affiliation: | Xing Feifei,Li Decai (School of Mechanical,Electronic and Control Engineering,Beijing Jiaotong University,Beijing 100044,China) |
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| Abstract: | A novel technique was developed to improve the magnetic fluid sealing scheme of the film depositors with two driving shafts.In the newly-developed technique,the shafts,teeth of the magnetic fluid seals and permanent magnets were completely sealed.The magnetic field distributions of the magnetic fluid sealing were simulated with the software package,Ansyst.The dependence of the anti-pressure capacity on the magnetic fluid injection was also experimentally studied.Extensive tests were performed to evaluate th... |
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| Keywords: | Magnetic fluid Seal Plating film machine Mechanical design |
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