| 超薄Al膜可见光光学特性与其特征尺寸的关系 |
| |
| 引用本文： | 白雪冬,黄荣芳,闻立时.超薄Al膜可见光光学特性与其特征尺寸的关系[J].真空科学与技术学报,1999(2). |
| |
| 作者姓名： | 白雪冬 黄荣芳 闻立时 |
| |
| 作者单位： | 中国科学院金属研究所!沈阳110015 |
| |
| 摘 要： | 利用WFZ90 0 D4型紫外 /可见光分光光度计 ,测量了磁控测射超薄Al膜的可见光反射比和透射比。采用牛顿 辛普森方法确定超薄Al膜光学函数 ,进而计算其介电函数 ,得到了它们随膜厚变化的关系。结果表明 ,不同特征尺寸的薄膜 ,具有不同的电磁特性参数
|
| 关 键 词： | 光学函数 介电函数 超薄铝膜 |
The Size Effect of the Visible Optical Characteristics for Ultrathin Al Films |
| |
| Bai Xuedong,Huang Rongfang,Wen Lishi.The Size Effect of the Visible Optical Characteristics for Ultrathin Al Films[J].JOurnal of Vacuum Science and Technology,1999(2). |
| |
| Authors: | Bai Xuedong Huang Rongfang Wen Lishi |
| |
| Abstract: | Reflection and transmittance of the magnetron sputtered ultrathin Al films in the visible wavelength region has been measured by WFZ900 D4 UV/VIS spectrophotometer. The optical function of the ultrathin Al film is obtained by Newton Raphson method, and dielectric function is calculated. The results show that the ultrathin Al films with different thickness have different electromagnetic characteristics. |
| |
| Keywords: | Optical function Dielectric function Ultrathin Al film |
| 本文献已被 CNKI 等数据库收录！ |
