| 溅射SnO_xF_y与SnN_xF_y减反射涂层 |
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| 引用本文： | 殷志强,白蒂尔,克劳斯.溅射SnO_xF_y与SnN_xF_y减反射涂层[J].真空科学与技术学报,1993(3). |
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| 作者姓名： | 殷志强 白蒂尔 克劳斯 |
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| 作者单位： | 清华大学电子工程系，Physics Department，Chalmers University of Technology and University of Gothenburg，Physics Department，Chalmers University of Technology and University of Gothenburg 北京 100084 |
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| 摘 要： | 反应高频磁控溅射SnO_xF_y与SnN_xF_y膜的沉积率约达50nm/min,这些膜的折射率约1.7,可用于作为金属氧化物涂层的减反膜。给出了SnO_xF_y/SnO_x与SnN_xF_y/SnO_x,多层膜的减反射性能。
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| 关 键 词： | 锡-氧-氟薄膜 锡-氮-氟薄膜 减反射涂层 |
SPUTTERED SnO_xF_y AND SnN_xF_y ANTIREFLECTION COATINGS |
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| Yin Zhiqiang,B. Stjerna,C. G. Granqvist.SPUTTERED SnO_xF_y AND SnN_xF_y ANTIREFLECTION COATINGS[J].JOurnal of Vacuum Science and Technology,1993(3). |
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| Authors: | Yin Zhiqiang B Stjerna C G Granqvist |
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| Abstract: | Films of SnO_xF_y and SnN_xF_y were made by reactive rf magnetron sputtering at rates up to 50 nm/min. they have refractive indices, of about 1.7 and are useful for antireflecting metaloxide -coated substrates. Spectral optical data,showing the antireflection property,are given for SnO_x/SnO_xF_y and SnO_x/SnN_xF_y tandem layers. |
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| Keywords: | SnO_xF_y thin film SnN_xF_y thin film Antireflection coating |
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