| IBAD薄膜与基体界面的显微结构 |
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| 引用本文： | 陶琨,何向军,江海,范玉殿,李恒德.IBAD薄膜与基体界面的显微结构[J].材料研究学报,1996,10(2):187-190. |
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| 作者姓名： | 陶琨 何向军 江海 范玉殿 李恒德 |
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| 作者单位： | 清华大学 |
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| 摘 要： | 采用中能离子束辅助沉积（ＩＢＡＤ）技术，在单晶Ａｌ２Ｏ３（０００１）基片上沉积Ｍｏ膜，在ＧＡＡｓ（００１）基片上合成Ｆｅ１６Ｎ２薄膜，用ＨＲＥＭ等研究了Ｍｏｅａｊｄ－Ａｌ２Ｏ３（０００１），Ｆｅ１６ｎ２膜－ＧａＡｓ（００１）界面的显微结构，结果表明：Ｍｏ膜的晶粒呈细小柱状或纤维状，晶粒平均尺寸约８ｎｍ，Ｆｅ１６Ｎ２薄膜为等轴晶，晶粒平均尺寸约为１０ｎｍ，在Ｍｏ膜－Ａｌ２Ｏ３（０００１）界面及Ｆｅ１
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| 关 键 词： | 离子束辅助沉积 界面 显微结构 薄膜 |
| 收稿时间： | 1996-04-25 |
| 修稿时间： | 1996-04-25 |
INVESTIGATION ON MICROSTRUCTURE OF THE INTERFACE BETWEEN IBAD THIN FILMS AND SUBSTRATE |
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| TAO Kun,HE Xiangjun,JIANG Hai,FAN Yudian,LI HengdeCorrespondent:.INVESTIGATION ON MICROSTRUCTURE OF THE INTERFACE BETWEEN IBAD THIN FILMS AND SUBSTRATE[J].Chinese Journal of Materials Research,1996,10(2):187-190. |
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| Authors: | TAO Kun HE Xiangjun JIANG Hai FAN Yudian LI HengdeCorrespondent: |
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| Affiliation: | TAO Kun,HE Xiangjun,JIANG Hai,FAN Yudian,LI Hengde(Tsinghua University)Correspondent: (Department of Materials Science and Engineering,Tsinghua University,Beijing ) |
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| Abstract: | Molybdenum film and Fe16N2 thin film were deposited on Al2O3 (0001) and GaAs (001)substrate respectively by ion-beam assisted deposition (IBAD). The microstructure of the interface between the films and substrates were studied on atomic scale by using the |
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| Keywords: | ion-beam assisted deposition (IBAD) interface microstructure |
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