| 热丝法化学气相沉积大面积金刚石膜中辐射场和温度场的尺寸效应 |
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| 引用本文： | 刘德义,黄荣芳,于杰,闻立时,师昌绪.热丝法化学气相沉积大面积金刚石膜中辐射场和温度场的尺寸效应[J].材料研究学报,1996,10(3):279-284. |
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| 作者姓名： | 刘德义 黄荣芳 于杰 闻立时 师昌绪 |
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| 作者单位： | 中国科学院金属研究所 |
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| 摘 要： | 对热丝法化学气相沉积金刚石膜中的辐射场和温度场进行了计算，结果表明，在样品平面沿Ｘ，Ｙ方向均辐照度（温度）区的线性尺寸比高温梯度区的尺寸快速增大，沿Ｚ方向均匀辐照度（温度）区的深度随样品到加热丝距离的增加而增大，辐照度（温度）的大小可通过改变加热丝间距得到控制。
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| 关 键 词： | 辐照场 金刚石膜 HFCVD 薄膜生长 |
| 收稿时间： | 1996-06-25 |
| 修稿时间： | 1996-06-25 |
SIZE EFFECT OF IRRADIANCE AND TEMPERATURE FIELDS IN LARGE AREA DIAMOND GROWTH BY HFCVD |
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| LIU Deyi,HUANG Rongfang,YU Jie,WEN Lishi,SHI Changxu.SIZE EFFECT OF IRRADIANCE AND TEMPERATURE FIELDS IN LARGE AREA DIAMOND GROWTH BY HFCVD[J].Chinese Journal of Materials Research,1996,10(3):279-284. |
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| Authors: | LIU Deyi HUANG Rongfang YU Jie WEN Lishi SHI Changxu |
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| Affiliation: | LIU Deyi;HUANG Rongfang;YU Jie;WEN Lishi;SHI Changxu(Institute of Metal Research.Chinese Academy of Sciences |
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| Abstract: | Irradiance and temperature fields are calculated for large area diamond growth by HFCVD.The results show that linear size of uniform irradiance(temperature) region in X and Y directions in sample plane increases more quickly than that of region of high irradiance(temperature) gradient.Depth of uniform irradiance(temperature) region in Z direction increases with increasing heater-sample spacing.Irradiance(temperature) level can be controlled by variation of spacing between neighboring heating filaments. |
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| Keywords: | irradiance field diamond growth HFCVD |
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