| 温度场对热丝化学气相沉积大面积生长金刚石膜的影响 |
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| 引用本文： | 陈岩,黄荣芳,闻立时,师昌绪.温度场对热丝化学气相沉积大面积生长金刚石膜的影响[J].材料研究学报,1995,9(3):245-249. |
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| 作者姓名： | 陈岩 黄荣芳 闻立时 师昌绪 |
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| 作者单位： | 中国科学院全属研究所，中国科学院物理研究所 |
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| 摘 要： | 用１００×１００ｍｍ大面积加热器进行了气相生长金刚石膜试验，对得到的金刚石膜样品作了拉曼光谱分析，并用扫描电镜观察了不同空间区域中金刚石形核的特点．拉曼光谱和扫描电镜观察的结果，均给出了与温度分布特点较好的对应．本研究的结果，指出厂热丝法大面积气相生长金刚石膜工业应用的可能性．
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| 关 键 词： | 气相沉积 金刚石薄膜 温度场 |
| 收稿时间： | 1995-06-25 |
| 修稿时间： | 1995-06-25 |
THE INFLUENCES OF TEMPERATURE FIELD ON LARGE AREA DIAMOND GROWTH OF DIAMOND FILM BY HFCVD |
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| CHAN Yan,HUANG Rongfang,WEN Lishi,SHI Chuangxu.THE INFLUENCES OF TEMPERATURE FIELD ON LARGE AREA DIAMOND GROWTH OF DIAMOND FILM BY HFCVD[J].Chinese Journal of Materials Research,1995,9(3):245-249. |
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| Authors: | CHAN Yan HUANG Rongfang WEN Lishi SHI Chuangxu |
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| Affiliation: | CHAN Yan,HUANG Rongfang,WEN Lishi,SHI Chuangxu(Institute of Metal Research,Chinese Academy of Sciences) |
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| Abstract: | The large area temperature field was formed through large area planary arrangment of parallel W filament arrangment. and the temperature distribution of temperature field was measured. The results have shown that an uniform temperature region of 70×70mmwi |
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| Keywords: | HFCVD diamond film temperature field |
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