N_2流量对车用钢表面磁控溅射CrTiAlN涂层性能的影响

目前,关于N_2流量对磁控溅射CrTiAlN涂层性能影响的研究不多。在SDC99冷作模具钢表面以不同N_2流量条件磁控溅射CrTiAlN涂层,采用扫描电镜、X射线衍射仪、显微硬度仪、显微镜和摩擦磨损试验分析涂层性能。结果表明:随着N_2流量的降低,涂层中Cr元素含量也随之下降,而N元素含量则逐渐增大,CrN(211)晶面的衍射峰缓慢增加,而CrN(200)衍射峰明显增加;CrTiAlN涂层硬度较基材提高约25%,随N_2流量降低,涂层的硬度逐渐增大;在60 m L/min的N_2流量下制备的CrTiAlN涂层和基体间结合力最佳,涂层对表面磨粒磨损情况起到最佳改善效果,此时磨痕的"犁沟"深度与宽度都减小,涂层耐磨性得到显著提高。

Effect of N2 Flow on the Performance of CrTiAlN Coating Prepared by Magnetron Sputtering on Car Steel Surface

Under different conditions of N2 flow rate,the CrTiAlN coatings were deposited on cold-work die steel SDC99 by magnetron sputtering technique.The performance of the coatings was characterized by means of scanning electron microscope (SEM),X-ray diffractometer (XRD),microhardness tester,nano indenter test system and pin-on-disc tribometer.Results showed that with the decrease of N2 flow rate,the Cr element content in coating decreased,while the N element content increased gradually.Moreover,the CrN (211) diffraction peak slowly declined,and the CrN (200) diffraction peak rose prominently.Compared with the substrate,the hardness of CrTiAlN coating increased by about 25 ％.With the decrease of N2 flow rate,the coating hardness increased gradually.In addition,the optimal N2 flow rate was determined as 60 mL/min,and the bonding strength between the prepared CrTiAlN coating and the substrate was the best.The obtained coating had the optimal effect on improving abrasive wear situation of coating,and the depth and width of the grinding crack decreased,which presented that the wear resistance of coating was enhanced significantly.