| 基于MEMS技术的三维氧化钌微电极准电容特性 |
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| 引用本文： | 文春明,温志渝,尤政,王晓峰.基于MEMS技术的三维氧化钌微电极准电容特性[J].纳米技术与精密工程,2013(1):74-78. |
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| 作者姓名： | 文春明 温志渝 尤政 王晓峰 |
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| 作者单位： | 重庆大学新型微纳器件与系统技术国家重点学科实验室;重庆大学国家级微纳系统与新材料技术国际研发中心;重庆大学微系统中心;清华大学精密仪器与机械学系 |
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| 摘 要： | 为增强电极在单位底面积上的电荷储存能力,设计利用MEMS技术制作高深宽比三维微电极结构,以增大电极结构表面积,并在结构表面制作功能膜形成电极.以硅为基底,SU-8光刻胶为材料制作了三维微电极结构,在结构表面溅射金作为集流体,用两电极体系进行方波脉冲电沉积,在三维微电极结构表面沉积氧化钌作为活性物质,制备了三维微电极.用扫描电镜和能谱对微电极表面形貌和物质组成进行表征,用循环伏安法等对微电极的电化学特性进行测试,三维微电极的比容量达0.79 F/cm2.
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| 关 键 词： | MEMS 三维微电极 氧化钌 SU-8光刻胶 超级电容器 |
Pseudo-Capacitive Behavior of Three-Dimensional Ruthenium Oxide Microelectrode Prepared by MEMS Technology |
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| Wen Chunming,Wen Zhiyu,You Zheng,Wang Xiaofeng.Pseudo-Capacitive Behavior of Three-Dimensional Ruthenium Oxide Microelectrode Prepared by MEMS Technology[J].Nanotechnology and Precision Engineering,2013(1):74-78. |
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| Authors: | Wen Chunming Wen Zhiyu You Zheng Wang Xiaofeng |
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| Affiliation: | 1.Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology,Chongqing University,Chongqing 400030,China;2.National Center for International Research of Micro/Nano-System and New Material Technology,Chongqing University,Chongqing 400030,China; 3.Microsystem Research Center,Chongqing University,Chongqing 400030,China; 4.Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China) |
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| Abstract: | To enhance the charge storage capacity of the electrode in unit floor area, high aspect ratio three-dimensional microelectrode structures were prepared by MEMS technology to increase the electrode surface area, and functional membranes were fabricated on the structures. The three-dimensional microelectrode structures were made by SU-8 photoresist on the silicon wafer, and gold was sputtered on the structure as a current collector. Ruthenium oxide as electroactive material was electroplated on the three-dimensional microelectrode structure surface with the square pulse electro-deposition method in two-electrode system. The microelectrode surface morphology and composition were characterized by scanning electron microscopy and energy dispersive spectroscopy. Electrochemical properties of micro- electrode were tested by cyclic vohammetry. It is found that the specific capacitance of the three-dimensional mieroeleetrode is 0.79 F/era2. |
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| Keywords: | MEMS three-dimensional microelectrode ruthenium oxide SU-8 photoresist super capacitor |
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