频闪干涉仪在微机电系统动态表征中的应用

微机电系统(MEMS)测试的主要目的是为工程开发中的设计和模拟过程提供数据反馈，其中一个重要方面就是MEMS器件动态特性的高速可视化．介绍了一种基于计算机控制的频闪干涉测试系统，用来测量可动MEMS器件的离面运动，实现了纳米级分辨力，该系统采用改进的相移干涉算法，使用一个大功率激光二极管(LD)作为频闪照明的光源，可以实现1MHz范围内大幅值(十几微米)的微运动测量，这种高离面灵敏度的测量方法特别适合进行微机械(光学)元件的动态特性测量．通过研究一个多晶硅微谐振器的动态特性说明了系统的强大功能。

Stroboscopic Interferometer for Dynamic MEMS Characterization

A key purpose for testing MEMS i s to provide data feedback of measurements to the design and simulation in t he process of development, where high-speed visualization of dynamic propertie s of MEMS devices is a very important aspect. This paper describes a computer- controlled stroboscopic interferometer system for measuring out-of-plane m otions of MEMS structures with nanometer resolution. The system uses a modified phase-shifting interferometric algorithm and a pulsed laser diode(LD) serves as the stroboscopic light source, permitting measurement of large-amplitude out- of-plane motions(above ten micrometers) below 1 MHz. The high out-of-plane se nsitivity of the method makes it particularly suitable for characterizing microm echanical (optical) elements. This paper illustrates the capabilities of the sy stem with a study of the dynamic behavior of a polysilicon micro-resonator.