五腔串联压电泵的设计制作与试验

为提高压电泵的输出能力,提出一种多腔串联压电泵,并从理论和试验两方面进行了研究.理论分析表明,在其他条件确定时,多腔串联压电泵的输出压力与泵腔数量n成正比,输出流量与姨%n成正比.设计制作了金属阀五腔串联压电泵,并以水为工作介质测试了工作腔数量不同时的输出特性.结果表明,压电泵工作腔数量不同时,存在不同的最佳工作频率使其输出压力或流量最大,且压力最佳频率及流量最佳频率均随工作泵腔数量的增加而增加,但增加幅度不同;在最佳频率时,五腔串联泵输出压力及流量均与工作腔数量成正比.在电压为150 V、工作频率为最佳频率时,5腔工作时的最大压力和流量分别为100 kPa和246.54 mL/min,分别为单腔工作时的6.7倍和4.2倍.

Design, Fabrication and Test of Serial-Connection 5-Chamber Piezoelectric Pump

In order to improve the output performance of piezoelectric pump, the design of serial-con- nection multi-chamber piezoelectric pump was studied theoretically and experimentally. The theoretic results show that, with other parameters constant, the backpressure is in direct proportion to the cham- ber number, and the output flowrate is in direct proportion to the root of chamber number. A serial- connection 5-chamber piezoelectric pump （FCPP） was fabricated and tested with water as working medium and different numbers of chambers operating. The testing results show that there are respective optimal frequencies for the FCPP with different numbers of operating-chambers to achieve maximal out- put capability. Both the optimal frequency for backpressure and that for flowrate increase with the oper- ating-chamber number, but the improving extent varies. Under the optimal frequencies, both the back- pressure and flowrate of the FCPP are in direct proportion to the operating-chamber number. When the voltage is 150 V and the frequencies are optimal, the maximal backpressure and flowrate achieved from the FCPP with 5 chambers running are 100 kPa and 246.54 mL/min, respectively, which are 6.7 times and 4.2 times larger than those obtained from the FCPP with one chamber running, respectively.