| 压电陶瓷激励微悬臂梁的动态特性 |
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| 引用本文： | 陈宇航,牛顿,黄文浩. 压电陶瓷激励微悬臂梁的动态特性[J]. 纳米技术与精密工程, 2011, 9(2): 140-144 |
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| 作者姓名： | 陈宇航 牛顿 黄文浩 |
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| 作者单位： | 中国科学技术大学精密机械与精密仪器系,合肥,230027 |
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| 基金项目： | 国家自然科学基金资助项目 |
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| 摘 要： | 结合流体中微悬臂梁振动频率响应的理论模型,通过实验、理论计算和基于流固耦合的有限元仿真3种方法,分析了在空气和去离子水中不同结构、尺寸的微悬臂梁的谐振频率、品质因子以及幅频响应曲线,并对3种方法得到的结果进行了对比.结果显示,空气中各种方法得到的谐振频率较为吻合,相对于实验值的偏差在1%以内.去离子水中,梁谐振频率的理论值和仿真值基本一致,而实验值则较大,前两者相对于实验值的偏差在13.9%～27.3%之间;对于品质因子,理论值和仿真值依然较一致,但相对于实验值出现较大偏差,最大达70.5%.分析表明,对于液体环境下压电陶瓷激励的微悬臂梁,频率响应曲线中干扰峰的存在会严重影响微悬臂梁品质因子的准确测量.微悬臂梁动态特性的研究对基于微悬臂梁的传感器的设计优化和液相原子力显微术的应用具有一定意义.
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| 关 键 词： | 微悬臂梁 谐振频率 品质因子 原子力显微镜 |
Dynamic Characteristics of Piezo-Actuated Microcantilever |
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| CHEN Yu-hang,NIU Dun,HUANG Wen-hao. Dynamic Characteristics of Piezo-Actuated Microcantilever[J]. Nanotechnology and Precision Engineering, 2011, 9(2): 140-144 |
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| Authors: | CHEN Yu-hang NIU Dun HUANG Wen-hao |
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| Affiliation: | CHEN Yu-hang,NIU Dun,HUANG Wen-hao(Department of Precision Machinery and Precision Instrumentation,University of Science and Technology of China,Hefei 230027,China) |
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| Abstract: | Based on the theoretical model of vibration frequency response of microcantilevers in fluids,the resonance frequencies,quality factors and the frequency response curves of microcantilevers with different structures and sizes in air and deionized water were investigated using experiments,theoretical calculation and fluid-structure coupled finite element analysis.Results of each approach were compared with those of the other's.Results show that the resonance frequencies in air obtained from the three differen... |
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| Keywords: | microcantilever resonance frequency quality factor atomic force microscopy |
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