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用于表面编码器的正弦波栅格的热模压制
引用本文:平林龙太郎,卢永晨,新井义一,高伟.用于表面编码器的正弦波栅格的热模压制[J].纳米技术与精密工程,2007,5(2):102-106.
作者姓名:平林龙太郎  卢永晨  新井义一  高伟
作者单位:日本东北大学纳米机械系纳米测量与控制实验室,仙台,980-8579,日本
基金项目:This work was financially supported by a grant from Ministry of Education, Culture, Sports, Science and Technology of Japan (MEXT).
摘    要:本文介绍了在多自由度纳米定位中,作为表面编码器测量基准的正弦波栅格的复制方法.该栅格表面的形貌为空间正弦波,即沿x和y方向均为波长100μm,振幅100nm的正弦波.这种栅格表面的大小为几十微米至几百微米.在安装了快速刀具伺服机构的金刚石车床上,制成了铝基栅格表面.该加工系统的优点是能够以高精度形成被加工表面,但另一方面,由于是在大面积内形成微观表面,故加工时间较长.为了实现快速制作,进行了基于基表面的复制,栅格表面的复制采取了热模压制法,在高分子薄膜上进行了实验.

关 键 词:复制  测量表面  纳米测量  聚合物
文章编号:1672-6030(2007)02-0102-05
修稿时间:2007-05-18

Hot Embossing of a Sine-Grid for a Surface Encoder
HIRABAYASHI Ryutaro,NOH Young Jin,ARAI Yoshikazu,GAO Wei.Hot Embossing of a Sine-Grid for a Surface Encoder[J].Nanotechnology and Precision Engineering,2007,5(2):102-106.
Authors:HIRABAYASHI Ryutaro  NOH Young Jin  ARAI Yoshikazu  GAO Wei
Affiliation:Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, Sendai 980-8579, Japan
Abstract:This paper describes the replication of a precision sinusoidal grid surface, which is used as the measurement reference of a surface encoder for nanometrology of multi-axis positions. The profile of the gird surface is a superposition of sinusoidal waves in the x-direction and the y-direction with spatial wavelengths on the order of 100 μm and amplitudes on the order of 100 nm. The area of the surface is on the order of several tens of millimeters to hundreds of millimeters. The aluminum master surfaces were fabricated on a diamond turning machine equipped with a fast tool servo, which has advantages of high accuracy and good surface finish but time-consuming for fabricating micro-structures over a large area. Replication from the master surface was then carried out for fast fabrication. Hot embossing was chosen as the replication method. Experiments of replication on polymer films were conducted.
Keywords:replication  metrology surface  nanometrology  polymer materials
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