轴对称非球面镜超精密加工新方法的几何模型

介绍了轴对称光学非球面镜超精密加工的新方法．超精密金刚石切削加工机床的刀具进给机构通常由直线导轨实现．由于旋转轴与同等精度的直线导轨相比，具有制造难度小、成本低及结构紧凑等优点，所以采用具有快速伺服机构的金刚石刀架摆臂代替直线导轨进给运动方式．根据非球面方程，快速伺服机构的微进给量根据车刀摆角实时计算．快速伺服机构、工件以及金刚石刀具的同时运动，可以实现轴对称非球面的超精密加工．构建了回转进给工具路径、快速伺服机构运动以及相关的几何模型．通过计算机模拟验证了该加工方法的简便与可靠性，可以降低非球面反射镜加工的设备投入，提高生产效率．

Modeling of the New Machining Methods for Ultra-Precision Axisymmetric Aspheric Mirrors

A new form generation method for ultra-precision axisymmetric aspheric mirrors is introduced. Linear motion guides are employed in the feed systems of most diamond turning machines. For rotary axes can be made less expensive, easier and more compact than a linear guide at the same precision level, a rotary ann that carries a diamond tool combined with a fast tool servo are used to replace the straight lines. The micro linear feed of the fast tool servo is real-time calculated with the use high resolution angular feedback on the swing tool based on the aspheric equation. Synchronized motion of the the fast tool servo, workpiece and the diamond tool produces ultra-precision axisymmetric aspheric mirrors. Geometric models of cutting tool path, the motion of fast tool servo and the corresponding calculations are presented. The machining approach is verified to be simple and reliable by computer simulation, so the production efficiency can be improved and the equipment input can be reduced.