| 激光干涉法测量微小振动 |
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| 引用本文： | 刘合伟,钱梦騄.激光干涉法测量微小振动[J].声学技术,2001,20(2):75-77. |
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| 作者姓名： | 刘合伟 钱梦騄 |
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| 作者单位： | 同济大学声学研究所, |
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| 基金项目： | 本课题由自然科学基金资助 |
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| 摘 要： | 文章介绍用激光干涉法测量新型压电微驱动器动态位移响应的实验原理及方法。实验结果表明，这类PZN－PZT微驱动器不仅具有高的电压－位移灵敏度，而且其频响可高达1kHz，是一种很好的微驱动器件。
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| 关 键 词： | 激光干涉 微小振动 新型压电微驱动器 动态位移响应 压电材料 电致伸缩 迈克尔逊干涉仪 |
| 文章编号： | 1000-3630（2001）02-0075-03 |
| 收稿时间： | 2000/3/27 0:00:00 |
| 修稿时间： | 2000年3月27日 |
Measurement of small vibration by laser interferometer |
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| LIU He-wei and QIAN Meng-lu.Measurement of small vibration by laser interferometer[J].Technical Acoustics,2001,20(2):75-77. |
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| Authors: | LIU He-wei and QIAN Meng-lu |
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| Affiliation: | Institute of Acoustics, Tongji University, Shanghai 200092, China;Institute of Acoustics, Tongji University, Shanghai 200092, China |
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| Abstract: | The theory and experimental method of measuring a small vibrating displacement by laser interferometer are introduced in the paper．And the experimental results of dynamic response displacement of a new kind of tiny piezoelectric driver are obtained．The results show that the kind of PZN-PZT tiny driver not only has high voltage-displacement sensitivity，but also it is frequency response approaches 1kHz，so its one very good kind of tiny driver． |
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| Keywords: | laser interferometer measurement of vibration tiny driver |
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