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薄膜体声波谐振器的梯形射频滤波器设计
引用本文:汤亮,郝震宏,乔东海,汪承灏.薄膜体声波谐振器的梯形射频滤波器设计[J].声学技术,2008,27(2):145-149.
作者姓名:汤亮  郝震宏  乔东海  汪承灏
作者单位:中国科学院声学研究所声学微机电实验室,北京,100080
摘    要:从Mason等效电路模型出发,研究了基于薄膜体声波谐振器的梯形结构射频滤波器的设计。以往的研究中都没有考虑到介质的声损耗,这样得到的滤波器频响中就未计人插入损耗的影响。采用射频网络方法对薄膜体声波谐振器建模,并在模型中加入了介质声损耗的影响,然后就基于薄膜体声波谐振器的梯形射频滤波器的传输响应、带宽、插入损耗、阻带抑制以及带内波纹情况进行了分析和讨论。

关 键 词:滤波器  双工器  振荡器  射频微机电系统  薄膜体声波谐振器
文章编号:1000-3630(2008)-02-0145-05
收稿时间:2007/4/25 0:00:00
修稿时间:2007年4月25日

Design of ladder-type RF filters based on FBARs
TANG Liang,HAO Zhen-hong,QIAO Dong-hai and WANG Cheng-hao.Design of ladder-type RF filters based on FBARs[J].Technical Acoustics,2008,27(2):145-149.
Authors:TANG Liang  HAO Zhen-hong  QIAO Dong-hai and WANG Cheng-hao
Affiliation:(MEMS laboratory of the Institute of Acoustics, Chinese Academy of Sciences, Beijing 100080, China)
Abstract:Design of ladder-type RF filters based on the film bulk acoustic resonators (FBARs) is pre- sented based upon Mason equivalent circuit model. Previous work did not take acoustic attenuation in the medium into account; therefore the effect of media loss on the obtained filter frequency response was neglected. Considering acoustic attenuation of the medium, the RF network method is used in filter modelmg. Some key problems in filter design, such as transmission response, bandwidth, insertion loss, out-band rejection and passband ripples axe investigated and analyzed.
Keywords:filter  duplexer  oscillator  RF MEMS  FBAR
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