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微量特种气体的FT-IR定量分析
引用本文:李福芬,曲庆,杨铁,乔晓梅,张孝玉.微量特种气体的FT-IR定量分析[J].低温与特气,2011,29(2):35-39.
作者姓名:李福芬  曲庆  杨铁  乔晓梅  张孝玉
作者单位:大连大特气体有限公司;
摘    要:利用傅立叶变换红外光谱法对微量一氧化氮、二氧化氮、氧化亚氮、氨气、氯化氢、二氧化硫、二氯氢硅、三氯氢硅、四氯化硅等使用常规方法分析难度大、灵敏度不足、操作复杂的气体样品进行了定量分析.在恒定实验条件下进样,分辨率为4 cm-1,扫描8次,可以得到理想的分析结果.以氨气、一氧化氮和二氧化氮为例的定量分析结果表明,该方法重...

关 键 词:FT-IR  微量  氮氧化物    氯化氢  氯硅烷

Quantitative Determination of Trace Special Gases with FT-IR Method
LI Fufen,QU Qing,YANG Tie,QIAO Xiaomei,ZHANG Xiaoyu.Quantitative Determination of Trace Special Gases with FT-IR Method[J].Low Temperature and Specialty Gases,2011,29(2):35-39.
Authors:LI Fufen  QU Qing  YANG Tie  QIAO Xiaomei  ZHANG Xiaoyu
Affiliation:LI Fufen,QU Qing*,YANG Tie,QIAO Xiaomei,ZHANG Xiaoyu(Dalian Special Gas Industry Company,Dalian 116021,China)
Abstract:Trace amount of special gases including NO,NO2,N2O,NH3,HCl,SO2,H2SiCl2,HSiCl3 and SiCl4 were determined quantitatively using FT-IR method.Satisfying results were obtained with a resolution of 4 cm-1 and 8 scans.The quantitative results of the gases such as NH3,NO and NO2 demonstrated that FT-IR method had excellent repeatability(RSD < 1%),linearity(R2 > 0.999),and low expanded uncertainty(< 4%).This method provided opportunities for the determination of IR active gases,which have difficulties in quantificat...
Keywords:FT-IR  trace  nitrogen oxides  ammonia  hydrogen chloride  chlorosilane  
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