| TiN/Ti多层膜韧性对摩擦学性能的影响 |
| |
| 引用本文： | 龚海飞,邵天敏.TiN/Ti多层膜韧性对摩擦学性能的影响[J].材料工程,2009(10). |
| |
| 作者姓名： | 龚海飞 邵天敏 |
| |
| 作者单位： | 清华大学,摩擦学国家重点实验室,北京,100084 |
| |
| 基金项目： | 国家重点基础研究发展计划973项目，国家自然科学基金资助项目 |
| |
| 摘 要： | 考察了TiN/Ti多层膜韧性对其摩擦学性能的影响.采用磁过滤阴极弧沉积的方法制备了具有不同Ti子层厚度的TiN/Ti多层膜.用透射电镜对其层状结构及子层厚度进行了观察和分析,分别用Rockwell硬度计和UMT摩擦磨损试验机,进行了压痕测试和摩擦磨损实验.结果表明,TiN/Ti多层膜中Ti子层的加人显著提高了多层膜的韧性,相对TiN单层薄膜,当载荷较大时,多层膜的耐磨性有明显的改善.结合实验结果,讨论了TiN/Ti多层膜韧性对其耐磨性的影响.
|
| 关 键 词： | 多层膜 韧性 摩擦学性能 |
Influence of Toughness on Tribological Performance of TiN/Ti Multilayer Coatings |
| |
| GONG Hai-fei,SHAO Tian-min.Influence of Toughness on Tribological Performance of TiN/Ti Multilayer Coatings[J].Journal of Materials Engineering,2009(10). |
| |
| Authors: | GONG Hai-fei SHAO Tian-min |
| |
| Affiliation: | GONG Hai-fei,SHAO Tian-min(State Key Laboratory of Tribology,Tsinghua University,Beijing 100084,China) |
| |
| Abstract: | Influence of toughness on tribological performance of TiN/Ti multilayer coatings was investigated.Filtered cathode vacuum arc(FCVA) deposition method was applied to prepare the TiN/Ti multilayer coatings with different Ti sublayer thickness.Transmission electron microscope(TEM) was used to observe the laminate structure and individual layer thickness of the TiN/Ti multilayer coatings.Indentation test and wear experiment were carried out on Rockwell-C hardmeter and universal micro materials tester(UMT),respe... |
| |
| Keywords: | TiN/Ti |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
