| 沉积时间对ZrTiN涂层微观结构及性能的影响 |
| |
| 引用本文： | 颜培,邓建新,连云崧,赵军,陈振.沉积时间对ZrTiN涂层微观结构及性能的影响[J].材料工程,2012(5):30-34,38. |
| |
| 作者姓名： | 颜培 邓建新 连云崧 赵军 陈振 |
| |
| 作者单位： | 山东大学机械工程学院,济南,250061 |
| |
| 基金项目： | 国家“973”计划项目(2009CB724402);国家自然科学基金项目(51075237);山东省杰出青年基金项目(JQ200917);山东省自然科学基金重点项目(ZR2010EZ002) |
| |
| 摘 要： | 采用多弧离子镀膜法,在YT15及YG8硬质合金基体上沉积ZrTiN硬质涂层,并分析涂层微观形貌、物相组成、涂层的厚度、硬度及结合力等性能参数随沉积时间的变化。结果表明:沉积时间不会影响ZrTiN涂层的晶面指数,涂层中只有单一面心立方结构相形成,且晶面指数始终为(111);涂层的晶粒尺寸约为10nm且随沉积时间变化不大。沉积时间为120min时,涂层的显微硬度和结合力明显下降。
|
| 关 键 词： | ZrTiN涂层 多弧离子镀 沉积时间 微观结构 性能 |
Effect of Deposition Time on Microstructures and Properties of ZrTiN coatings |
| |
| YAN Pei
,
DENG Jian-xin
,
LIAN Yun-song
,
ZHAO Jun
,
CHEN Zhen.Effect of Deposition Time on Microstructures and Properties of ZrTiN coatings[J].Journal of Materials Engineering,2012(5):30-34,38. |
| |
| Authors: | YAN Pei DENG Jian-xin LIAN Yun-song ZHAO Jun CHEN Zhen |
| |
| Affiliation: | (School of Mechanical Engineering,Shandong University,Jinan 250061,China) |
| |
| Abstract: | Multi arc ion plating ZrTiN hard coatings were deposited on WC/TiC/Co and WC/Co cemented carbide substrate with independent Ti and Zr targets.The effect of deposition time on morphology,phase composition,thickness,hardness and adhesive strength of the coatings was investigated,respectively.The results show that only face centered cubic structure phase forms in the coatings and the crystal orientation maintains(111).Grain size of the coating is around 10nm without changing during experimental process.Microhardness and adhesive strength of the coatings decline evidently when deposition time is 120min. |
| |
| Keywords: | ZrTiN coating multi arc ion plating deposition time microstructure property |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
