| 多光子纳米加工中激光扫描条件对金属微纳结构的影响 |
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| 引用本文： | 靳伟,董贤子,赵震声,段宣明.多光子纳米加工中激光扫描条件对金属微纳结构的影响[J].材料工程,2011(12):58-62. |
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| 作者姓名： | 靳伟 董贤子 赵震声 段宣明 |
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| 作者单位： | 1. 中国科学院功能晶体与激光技术重点实验室,北京100190;中国科学院研究生院,北京100190
2. 中国科学院功能晶体与激光技术重点实验室,北京,100190 |
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| 基金项目： | 973计划资助项目(2010CB934103);国家自然科学基金资助项目(50773091,60907019,50973126,61077028) |
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| 摘 要： | 研究了飞秒激光多光子还原制备银微纳结构技术中激光扫描条件对金属微纳结构与形貌的影响。结果表明:增加激光扫描点间距d可获得较小线宽,延长曝光时间t使线条变宽,增加扫描次数N可使金属微纳结构表面银纳米粒子熔融凝固成较大尺寸颗粒及块状物。
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| 关 键 词： | 多光子纳米加工 多光子光化学还原 金属微纳结构 |
Effects of Laser Scanning Conditions on Metallic Micro/Nanostructures in Multiphoton Nanofabrication |
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| JIN Wei,DONG Xian-zi,ZHAO Zhen-sheng,DUAN Xuan-ming.Effects of Laser Scanning Conditions on Metallic Micro/Nanostructures in Multiphoton Nanofabrication[J].Journal of Materials Engineering,2011(12):58-62. |
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| Authors: | JIN Wei DONG Xian-zi ZHAO Zhen-sheng DUAN Xuan-ming |
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| Affiliation: | 1(1 Key Laboratory of Functional Crystals and Laser Technology, Chinese Academy of Sciences,Beijing 100190,China; 2 Graduate University of Chinese Academy of Sciences,Beijing 100190,China) |
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| Abstract: | The influences of laser scanning conditions on the silver micro/nanostructures in multiphoton photoreduction of metallic micro/nanostructures and morphology using femtosecond laser were investigated.The results indicated that increasing the distance between scanning points(d) could make the width of lines become smaller and extending the exposure of time(t) could make the lines broadening.Furthermore,the increasing of scanning times(N) led to the formation of large silver particles and lumps on the structures due to the fusion of silver nanoparticles which on the surface of metallic micro/nanostructures. |
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| Keywords: | multiphoton nanofabrication multiphoton photoreduction metallic micro/nanostructure |
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