择优取向铁电薄膜制备影响因素的分析

制备性能优良、高度择优取向或外延生长、成分均匀、结构可控的晶态铁电薄膜材料，是发展铁电薄膜应用的基础。随着铁电薄膜在微电子学，光电子学和集成光学等领域的应用不断扩大，如何制备高性能的铁电薄膜材料一直称为人们关注的热点。对择优取向铁电薄膜材料制备技术中的主要影响因素进行了分析，希望能为从事此方面工作的研究者提供一定的借鉴。

An Analysis of Factors Influencing Preferred Oriented Ferroelectric Thin Films in Preparation

Widespread use of ferroelectric films depends on preparation of films with better properties,higher preferred orientation,epitaxial growth,improved homogeneity and controlled configuration. Ferroelectric thin films have been applied in some fields such as microelectronics,optoelectrics and integrated optics. The preparation of high-performance ferroelectric thin films has drawn much attention. The paper analyses the factors which influence preferred oriented ferroelectric thin films in preparation process, thus providing some useful clues to researchers in this fields.