大直径连续SiC（或硼）纤维射频气相沉积法的产业化生产

介绍了实现了借助高频加热法硅烷化学气相沉积生产SiC纤维的工业化过程。着重介绍了化学气相沉积法的原理、SiC（或B）纤维工业化生产的工艺、流程和设备。此外，该法也可用于生产大直径连续硼纤维、硼化钛纤维以及各种不同的表面涂层等。

Industrialized Production of SiC Fiber by Radio Frequency Chemical Vapor Deposition

An industrialized process of chemical vapor deposition by heating silane in virtue of radio frequency electro-magnetic field, has been implemented for producing silicon carbide fibers. In this paper, the principle of the CVD, the industrialized technique, flowsheet and equipments for SiC producing are introduced as the stressed points. Furthermore this method as well as the equipments can also be used for producing continuous boronic filaments with large diameter, titanium boride fibers and various surface coats etc.