| 掺硼金刚石薄膜二次电子发射特性的研究 |
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| 引用本文： | 王玉乾,王兵,甘孔银,李凯,潘清,黎明,王延平.掺硼金刚石薄膜二次电子发射特性的研究[J].材料导报,2009,23(3). |
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| 作者姓名： | 王玉乾 王兵 甘孔银 李凯 潘清 黎明 王延平 |
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| 作者单位： | 1. 西南科技大学材料学院,绵阳,621010
2. 中物院应用电子学研究所,绵阳,621900 |
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| 基金项目： | 国家自然科学基金，国家高技术研究发展计划(863计划) |
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| 摘 要： | 掺硼金刚石薄膜具有负电子亲和势和良好的电子运输性能且容易制备,作为冷阴极材料在图像显示技术和真空技术等方面都有着巨大的应用价值,引起人们的注意.从二次电子发射的机理以及影响二次电子发射系数的因素等方面,对如何利用MPCVD法制备出高二次电子发射系数的掺硼金刚石薄膜进行了综述.论述表明通过合适的工艺条件,对薄膜表面进行适当的处理,是可以制备出高二次电子发射系数的阴极用金刚石薄膜的.
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| 关 键 词： | 掺硼金刚石薄膜 二次电子发射 化学气相沉积 |
Study on Secondary Electron Emission Performance of B-doped Diamond Films |
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| WANG Yuqian,WANG Bing,GAN Kongyin,LI Kai,PAN Qing,LI Ming,WANG Yanping.Study on Secondary Electron Emission Performance of B-doped Diamond Films[J].Materials Review,2009,23(3). |
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| Authors: | WANG Yuqian WANG Bing GAN Kongyin LI Kai PAN Qing LI Ming WANG Yanping |
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| Affiliation: | 1School of Materials Science and Engineering;Southwest University of Science and Technology;Mianyang 621010;2Institute of Applied Electrinics;CAEP;Mianyang 621900 |
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| Abstract: | B-doped diamond thin films as an attractive cold cathode meterial used in picture display technique and vacuum technique etc have great application value,because of their specific negative electron affinity surfaces,good electron transport properties and the easy acquirement.This huge application value draws people's attention.How to use MPCVD making B-doped diamond thin films with high secondary electron emission yield is described and reviewed by analyzing the mechanism of secondary electron emission and ... |
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| Keywords: | B-doped diamond thin films secondary electron emission CVD |
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