微流量测量方法及其技术的发展

归纳了近五年来基于MEMS技术的微流量传感器结构及性能参数。根据国际上热门的研究方法推断微流量测量技术可能的发展方向与研究趋势,即集成两种或两种以上的测量方法,实现优势互补,提高测量精度或扩大量程比。最后基于现有的技术基础,提出了融合科氏效应与差压效应的微流量测量方法,阐述了传感器的工作原理与理论基础,并对其可行性进行了分析与论证。

The Approaches and Development of the Micro Flow Measurement

This paper summarizes the structures and performance parameters of various Micro flow sensors based on MEMS technology. The possible development direction of micro flow measurement technique is inferred according to international popular research, which is the combination of two or more approaches with complementary advantages, aiming to improve the measurement accuracy and expand the range ratio. Finally, the integrated method of Coriolis effect and pressure loss effect is proposed based on existing technology. The operating principle and theoretical basis of the sensor are described to verify the feasibility of the approach.