基于离心机的低气压精密控制研究

针对惯性器件全量程气压灵敏度校准难题,发明了一种可抗高离心加速度的气压箱结构,并研制了离心-气压复合校准装置,实现了大g值条件下惯性器件气压特性的校准。本装置设计了两种工作模式:离心机静止时,利用真空泵、高精度压力传感器等气压精密测控系统实现离心-气压复合校准装置的精密控压;离心机工作时,通过密封技术等实现离心-气压复合校准装置保压。本装置通过对安装在离心机上的试验箱内气压进行精密控制,将高线加速度与气压环境有机结合在一起,为加速度计提供可靠的加速度、气压复合计量校准环境。实验结果验证了所设计的气压箱结构可以实现气压范围1~100 kPa,气压偏差优于10 Pa的精密控制。

Precision Control of Low Air Pressure Based on Centrifuge

Aiming at the problem of calibrating the full-range air pressure sensitivity of inertial devices, an air pressure box structure capable of resisting high centrifugal acceleration is invented, and a centrifugal-air pressure composite calibration device is developed to realize the calibration of the air pressure characteristics of inertial devices under the condition of large g value. Two working modes are designed based on the centrifugal-air pressure compound calibration device. When the centrifuge is stationary, the precise pressure control of the centrifugal-air pressure compound calibration device is realized by using precise pressure measurement and control systems such as vacuum pump and high-precision pressure sensor. When the centrifuge is working, the pressure maintaining scheme of the centrifugal-air pressure composite calibration device is realized through sealing technology and the like. Therefore, the device organically integrates high linear acceleration and air pressure environment by precisely controlling the air pressure in the experimental box installed on the centrifuge, and provides a reliable acceleration and air pressure compound metering calibration environment for the accelerometer. The experimental results verify that the designed air pressure box structure can realize precise control of the air pressure in the range of 1 kPa to 100 kPa and the air pressure deviation is better than 10 Pa.