AFM定位系统动态误差补偿方法研究

原子力显微镜（AFM）是进行纳米测量和操作的重要工具。针对力测量过程中AFM定位系统的测量速度慢和窄带等问题,基于逆系统的迭代学习控制思想,设计一个前馈控制环节,补偿AFM定位系统中z轴方向上动态特性非线性影响。通过在一定带宽内对期望输入信号进行轨迹跟踪,使激励力（通过悬臂梁）无失真地施加在样本上,达到AFM准确测量的目的。该方法不仅拓宽了系统频带,而且提高了系统输出对期望输入的跟踪精度。

Research of Dynamic Error Compensation for Nano-positioning System of AFM

Atomic-force-microscopy（AFM）is an important instrument for nanoscale measurement and manipulation.To solve the problems, such as slow operation and narrow-banded in nanomechanical measurement, a set of feed-forward control link based on a inversion-based iterative learning control is proposed, the method compensates the nonlinear of dynamic characteristic of AFM positioner system in z-axis direction, thereby allowing the precise applications of a excitation force, by trajectory tracking of desired input force over a broad frequency range, to achieve accurate measurement.The approach increases the bandwidth of the system and improves the precision of the system during tracking the expected input signal.