Mo离子注入和离子渗硫对TiN涂层微观结构和表面性能的影响

为进一步改善氮化钛涂层的摩擦学性能,分别采用高剂量Mo离子注入和低温离子渗硫技术对Ti N涂层表面进行处理。采用扫描电子显微镜(SEM)、光学形貌仪、扫描俄歇系统(SAM)、X射线衍射仪(XRD)和纳米压痕仪等分析Ti N涂层处理前后的表面形貌、元素分布、微观结构和纳米硬度。利用球盘摩擦磨损试验机在干摩擦条件下考察涂层的摩擦学性能,并利用光学形貌仪和SEM进行磨损表面分析。结果表明,大剂量Mo离子注入后,Ti N涂层表面Mo离子深度接近200 nm,涂层硬度明显降低,涂层磨损剧烈程度得到显著改善,磨损率和摩擦因数分别降低约35%和40%;低温离子渗硫复合处理后,Ti N涂层表面溅射明显,Mo的深度降低约50%,摩擦学性能难以进一步明显改善。

Effects of Mo Ion Implantation and Ion Sulfurization on Microstructure and Surface Properties of TiN Coatings

In order to improve the tribological performances of TiN coatings, Mo ion implantations at high doses and low temperature ion sulfurization (LTIS) were utilized to treat PVD TiN coatings. SEM, optical profilometer, SAM, XRD, and nano indenter system were used to study the surface morphology, element distribution, microstructure, and nano-hardness. A ball-on-disc tribometer was employed to evaluate the tribological properties of the coatings under dry sliding, SEM and optical profilometer was used to characterize the worn surface. The results show that Mo ions with the depth of about 200 nm was found on TiN coatings after high-dose Mo ion implantations. The surface nano-hardness of Mo-implanted TiN coatings decreases. While the severe wear of Mo-implanted TiN coatings is obviously improved, decreasing by about 35% and 40% for wear rates and friction coefficients, respectively. Moreover, LTIS produces evident sputtering on TiN-Mo-S coating surface with Mo depth reducing by about 50%, compared with TiN-Mo coatings. It is concluded that LTIS could not further improve the tribological properties of TiN coatings pre-implanted by Mo ions.