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图形化固体薄膜技术及其摩擦学性能的研究进展
引用本文:邵天敏,耿哲.图形化固体薄膜技术及其摩擦学性能的研究进展[J].中国表面工程,2015,28(2):1-26.
作者姓名:邵天敏  耿哲
作者单位:清华大学 摩擦学国家重点实验室, 北京 100084
摘    要:固体薄膜技术可以用于显著提高材料的摩擦学性能,表面图形化技术则通过在部件表面制备预先设计的图形来改善摩擦副的接触和润滑行为。近年来,人们尝试将表面图形化技术和固体薄膜技术相结合,出现了一类称之为图形化薄膜的技术。研究表明:在很多情况下,与单纯的完整薄膜或图形化表面相比,图形化薄膜能够同时发挥薄膜的强化作用和图形化改变摩擦界面行为的作用,在改善和提高摩擦学性能方面具有综合优势。文中总结了图形化薄膜技术方面的研究工作;介绍了图形化薄膜的制备技术、分类、摩擦学性能以及应用;分析讨论了图形化薄膜的作用机理;并展望了图形化薄膜的发展前景。

关 键 词:图形化固体薄膜    制备技术    摩擦学性能    减摩耐磨机理    应用研究

Research Progress in Patterned Thin Solid Film Techniques and Their Tribological Performance
SHAO Tianmin,GENG Zhe.Research Progress in Patterned Thin Solid Film Techniques and Their Tribological Performance[J].China Surface Engineering,2015,28(2):1-26.
Authors:SHAO Tianmin  GENG Zhe
Affiliation:State Key Laboratory of Tribology, Tsinghua University, Beijing 100084
Abstract:Tribological performance of materials can be significantly increased by applying thin solid film technologies. Surface pattern technology can also be used to improve the contact and lubrication behaviors of friction pairs by producing pre-designed patterns on components. In recent years, techniques named as patterned thin solid films which combine surface patterning technology with thin solid film technology have been developed. It has been indicated that in many cases, compared with simply applying surface patterns or full thin solid films, patterned thin films demonstrate comprehensive advantages in improving tribological performance due to the synergy between the enhancement of thin solid films and the regulation of interfacial performance by surface patterns. In this paper, studies on patterned thin film technologies are summarized. Production techniques for patterned thin solid films are introduced and classified. Research work on tribological performance and application of patterned thin solid films are also introduced. The mechanism of the patterned thin solid film techniques are analyzed and discussed. Prospects for the development of the technology are also discussed.
Keywords:patterned thin solid film  preparation technology  tribological performance  mechanism of friction reduction and anti-wear  application research
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