激光干涉仪检测光路的快速校准方法

在使用激光干涉仪时,光路校准过程比较困难,需反复调整,耗时极长,严重依赖操作者的技术水平及经验,导致检测效率大大降低。通过对雷尼绍XL-80激光干涉仪检测的机床直线轴Y轴的光路进行分析,建立被测轴的齐次坐标变换误差模型,利用机床Y轴移动距离,再借助随着光点从光靶中心移动到光靶边缘的固定距离,求解与被测轴Y轴位置无关的激光发射器偏摆和俯仰角,以及间接得到激光器和反射镜位置偏移误差和光点在坐标系间变换的距离。通过建立的误差模型求解无法直接测量的分光镜与反射镜绕各自本身垂直底座轴线的偏摆误差,调整各部件,快速准确地完成光路校准。

Rapid Calibration Method for Detecting Optical Path of a Laser Interferometer

The optical path calibration process using a laser interferometer is difficult. It needs to be adjusted repeatedly, which takes a long time. Also, it requires the skill level and experience of the operator, leading to a significant reduction in measuring efficiency.The optical path calibration process of the Y-axis of a three-axis machine tool was analyzed by Renishaw XL-80 laser interferometer.The homogeneous coordinate transformation error model of the measured axis was established.By means of the fixed distance from the center of the light target to the edge of the light target as the light spot moves, the laser transmitter yaw and pitch angle, which were independent of the Y-axis position of the measured axis, were solved. The laser and mirror position offset errors and the distance that the spot changed between coordinate systems were indirectly obtained. With the established error model, the yaw error of the beam splitter and the mirror around their respective vertical base axes that could not be directly measured were obtained. The components were adjusted to complete the optical path calibration process quickly and accurately.