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Emission spectra of microwave plasma and MPCVD transparent diamond film
作者姓名:周健  何伟  袁润章  姜德生  汪建华
作者单位:1. State Key Laboratory of Advanced Technology for Materials Synthesis and Processing,Wuhan University of Technology,Wuhan 430070,P.R.China; 2. Fiber Optic Sensing Tech
基金项目:Project ( 99J0 70 )supportedbytheNaturalScienceFoundationofHubeiProvince
摘    要:1 INTRODUCTIONMicrowaveplasmaisformedbyexciteddeposi tiongasintheactionofmicrowaveenergy .Electronsviolentlyvibrateundertheactionofahighfrequencyelectromagneticfieldwhichgreatlypromotesthecolli sionamongatoms ,radicalsandmolecules1] ,thustheionizationdegr…

关 键 词:emission  spectra  H  γ  C  2  MPCVD  tansparent  diamond  film

Emission spectra of microwave plasma and MPCVD transparent diamond film
ZHOU Jian,HE Wei,YUAN Run-zhang,JIANG De-sheng.Emission spectra of microwave plasma and MPCVD transparent diamond film[J].Transactions of Nonferrous Metals Society of China,2000,10(4).
Authors:ZHOU Jian  HE Wei  YUAN Run-zhang  JIANG De-sheng
Abstract:
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