| 基于有限元法的硅片冰冻固结磨料抛光温度场分析 |
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| 引用本文： | 赵宇飞,左敦稳,孙玉利,卢文壮.基于有限元法的硅片冰冻固结磨料抛光温度场分析[J].金刚石与磨料磨具工程,2009(1). |
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| 作者姓名： | 赵宇飞 左敦稳 孙玉利 卢文壮 |
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| 作者单位： | 南京航空航天大学,机电学院,南京,210016 |
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| 基金项目： | 江苏省自然科学基金前期预研项目，江苏省精密与微细制造技术重点实验室资助项目，江苏省普通高校研究生科研创新计划项目 |
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| 摘 要： | 本文分析了低温固结磨料抛光硅片的传热模型,并借助有限元软件ANSYS对热传导过程进行了仿真,获得了冰冻磨具在不同抛光时刻的温度场等温图及工作区域的融化厚度值。并且在相同工艺参数下,进行抛光实验,验证了有限元数值分析结果。分析仿真结果表明:环境温度为20℃情况下,磨削热并非是导致冰冻磨具融化的主要原因,周围空气对流换热对温度场的影响较大,磨具温升速度为先快后慢,抛光区域的融化速度比较稳定。采用此有限元模型,可以分析抛光时间、环境温度等参数对温度场的影响,为低温固结磨料抛光硅片的温度场研究提供理论指导。
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| 关 键 词： | 温度场 有限元法 抛光 低温固结磨料 |
Analysis on temperature field when polishing with ice fixed abrasives based on FEM |
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| Zhao Yufei,Zuo Dunwen,Sun Yuli,Lu Wenzhuang.Analysis on temperature field when polishing with ice fixed abrasives based on FEM[J].Diamond & Abrasives Engineering,2009(1). |
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| Authors: | Zhao Yufei Zuo Dunwen Sun Yuli Lu Wenzhuang |
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| Affiliation: | College of Mechanical and Electrical Engineering Nanjing University of Aeronautics and Astronautics;Nanjing210016;China |
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| Abstract: | Heat transfer model was analyzed for polishing with ice fixed abrasives in this paper.With ANSYS finite element,the value of temperature fields for polishing was simulated.The temperature contour map of temperature field and the melting thickness values of working area of ice fixed abrasive tool were obtained.Polishing experiments were conducted with the same technological parameters.Compared with polishing experiments,the simulation result of FEM model was proved to be right.According to the simulation res... |
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| Keywords: | temperature field finite element method（FEM） polishing ice fixed abrasive |
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