| 碳源浓度对金刚石薄膜涂层刀具性能的影响 |
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| 引用本文： | 孙方宏,陈明,张志明.碳源浓度对金刚石薄膜涂层刀具性能的影响[J].金刚石与磨料磨具工程,2000(5):3-6. |
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| 作者姓名： | 孙方宏 陈明 张志明 |
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| 作者单位： | 上海交通大学机械工程学院 200030 |
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| 基金项目： | 国家863计划新材料领域资助项目(715-002-0010) |
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| 摘 要： | 用热丝ＣＶＤ法，以丙酮为碳源，在ＷＣ－Ｃｏ硬质合金衬底上沉积金刚石薄膜，研究了碳源浓度对金刚石薄膜涂层刀具性能的影响，结果表明，碳源浓度对金刚石涂层薄膜质量、形貌和粗糙度、薄膜与衬底间的附着力、刀具的耐用度用度发削性能有显著影响，合理控制碳源浓度对获得实用化的在硬质合金刀具基础上沉积高附着强度、低粗糙度金刚石薄膜的新技术具有重要的意义。
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| 关 键 词： | 涂层刀具 金刚石薄膜 碳源浓度 性能 磨损 |
| 修稿时间： | 2000年5月16日 |
Effect of Carbon Source Concentration on Mechanical Properties of HFCVD Diamond Thin Film Coated Tools |
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| Sun Fanghong et al.Effect of Carbon Source Concentration on Mechanical Properties of HFCVD Diamond Thin Film Coated Tools[J].Diamond & Abrasives Engineering,2000(5):3-6. |
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| Authors: | Sun Fanghong |
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| Affiliation: | Sun Fanghong et al |
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| Abstract: | The diamond thin film is deposited on WC- Co cemented carbide substrate using the acetone as the carbon source by the hot filament chemical vapor deposition(HFCVD). The influence of the carbon source concentration on mechanical properties of diamond-coated thin film tools have been investigated. The results show that increasing the carbon source concentration greatly affects the surface roughness, morphology, chemical quality, adhesion strength, and the cutting performances of the diamond-coated thin film tool. It is of great significance for practical application of the new technology of depositing diamond thin film with low surface roughness and high adhesion strength on the cemented carbide substrate by appropriately controlling the carbon source concentration. |
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| Keywords: | diamond-coated tool diamond thin film carbon source concentrat |
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