微磨料空气射流加工技术的发展

微磨料空气射流加工(MAJM)技术是对硬脆材料进行微细加工的一种非常有潜力的技术，特别是对复杂的三维微细结构的加工。微磨料空气射流加工技术是基于传统的喷砂技术发展起来的，通过由空气喷射磨料微粒形成高速气流冲击工件表面而去除工件材料。与其它的加工技术相比，微磨料空气射流加工具有环境友好、易于控制、无热影响区、切口质量好等优点。本文介绍了此技术的基本加工原理、特点以及加工过程中的影响因素，论述了微磨料空气射流加工的材料冲蚀机理和切口特征。重点分析了一些主要的加工参数，例如空气压力、磨料材料、尺寸、供给率、喷嘴的形状和尺寸、喷射距离以及工件材料，对切削性能和切口特征的影响。并提出了微磨料空气射流加工技术中有待进一步深入开展的研究工作。

Development of Micro Abrasive Jet Machining Technology

Micro Abrasive Jet Machining (MAJM) is a promising technique for micro processing of hard and brittle materials, particularly for machining complicated three - dimensional microstructures. MAJM is developed based on the fundamental of traditional abrasive jet. MAJM removes surface material by the impact of a bundle of high speed fine abrasive particles carried in an air jet. Comparing with other processes, dry air blasting is regarded friendly to the environment, easier to control, no heat affected area, good quality kerf, etc. The basic principle and characteristics of the technology and the influencing factors to the machining process are introduced and discussed, together with the erosion mechanisms and kerf characteristics. Particular attention is paid to the analysis of the effects of some major process parameters, such as air pressure, abrasive material, size and supply rate, nozzle shape and dimension, stand - off distance and workpiece material on the cutting performance and kerf characteristics. And the further research on MAJM technology is proposed.