Comparison in interfacial phenomena in electric-field assisted anodic bonding of Kovar-glass and Kovar/Al film-glass

Anodic bonding of Kovar-glass and Kovar/Al film-glass were performed at temperatures of 513 K to 663 K under the static electric voltage of 500 V, in order to compare the interfacial phenomena in electric-field assisted anodic bonding of Kovar-glass and Al-glass . SEM and EPMA were used to observe and analyzed the interfacial region. The growth rate of the alkali ions depletion layers in Kovar/Al-glass joint was slower than that in Kovar-glass joint. But the activation energies for the growth of depletion layers are about the same for both kinds of joint.