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Vibration-assisted dry polishing of fused silica using a fixed-abrasive polisher
Affiliation:1. Department of Machine Intelligence & Systems Engineering, Akita Prefectural University, Yurihonjo 015-0055, Japan;2. Department of Intelligent Systems Engineering, Ibaraki University, Hitachi 316-8511, Japan;1. Fraunhofer Institute for Laser Technology ILT, Steinbachstr. 15, 52074 Aachen, Germany;2. Chair for the Technology of Optical Systems TOS, RWTH Aachen University, Steinbachstr. 15, 52074 Aachen, Germany;3. RWTH Aachen University, Templergraben 55, 52062 Aachen, Germany;4. Chair for Laser Technology LLT, RWTH Aachen University, Steinbachstr. 15, 52074 Aachen, Germany;1. Graduate School of Science and Engineering, Ibaraki University 4-12-1 Nakanarusawa, Hitachi, Ibaraki 316-8511, Japan;2. School of Engineering, Ibaraki University 4-12-1 Nakanarusawa, Hitachi, Ibaraki 316-8511, Japan;3. Ultra-precision Machining Center, Zhejiang University of Technology, No.18, Chaowang Road, Xiacheng District, Hangzhou City, 310014, PR China;1. Department of Machine Intelligence & Systems Engineering, Akita Prefectural University, Yurihonjo, Akita 015-0055, Japan;2. School of Aeronautical Manufacturing Engineering, Nanchang Hangkong University, Nanchang 330063, PR China;1. Technology Center, The Timken Company, North Canton, OH, USA;2. Department of Mechanical and Aerospace Engineering, University of Florida, USA;3. Department of Materials & Manufacturing Technology, Chalmers University of Technology/Scania CV, Södertälje, Sweden;4. Institute of Machine Tools and Manufacturing, ETH Zurich, Switzerland;5. Institute of Machine Tools and Production Technology (IWF), Technical University of Braunschweig, Germany
Abstract:Glass is a ubiquitous but essential material in everyday life and industry. The most common method for polishing glass involves the use of free abrasives. However, this method is basically non-deterministic and lacks efficiency. Therefore, vibration has been employed to aid fixed-abrasive polishing in our research. It is found that the vibration can increase the material removal rate while maintain surface quality in fixed abrasive polishing. Normalized Preston coefficients that are the index of the polishing capability of a certain polishing process considerably increase in vibration-assisted polishing process. A mathematic model is set up to interpret the increase in material removal rate for vibration process. The modeled results show that the vibration can improve material removal by increasing vibration amplitude in vertical direction while the horizontal vibration contributes little to increasing material removal rate, which agrees well with experimental results. Aside from material removal, surface morphology of polished glass was also modeled for both vibration and conventional processes. Both experimented and simulated morphology evidence that the vibration some periodic structure on polished surface. The possible mechanism in dry fixed abrasive polishing was also chemically analyzed and a probable mechanism is put forward to clarify the material removal in dry fixed abrasive polishing.
Keywords:Fixed-abrasive polishing  Fused silica  Vibration polishing  Surface morphology
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