| 多元超硬膜TiAlN的制备及其组织性能研究 |
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| 引用本文： | 刘德浚,王少刚.多元超硬膜TiAlN的制备及其组织性能研究[J].热加工工艺,1999(6):22-23. |
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| 作者姓名： | 刘德浚 王少刚 |
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| 作者单位： | 南京航空航天大学材料科学与工程系!江苏南京210016 |
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| 基金项目： | 江苏省应用基础研究基金 |
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| 摘 要： | 采用空心阴极离子镀方法，分别以Ｔｉ＋ Ａｌ％ 和ＴＣ４作为蒸发材料，在高速钢表面沉积ＴｉＡｌＮ多元超硬膜。结果表明，该镀膜工艺可行，制备出的ＴｉＡｌＮ膜层性能优异，即硬度高、膜层与基体之间结合良好。文中还对膜层的微观组织结构进行了分析。
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| 关 键 词： | 离子镀 TiAlN 制备 组织和性能 |
Study on Manufacture and Structure and Properties of the Multi components Super Hard TiAlN Films |
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| LIU De jun,WANG Shao gang,YAO Zheng jun,SHEN Xing.Study on Manufacture and Structure and Properties of the Multi components Super Hard TiAlN Films[J].Hot Working Technology,1999(6):22-23. |
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| Authors: | LIU De jun WANG Shao gang YAO Zheng jun SHEN Xing |
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| Abstract: | Using Ti Al% and TC4 as evaporating materials respectively,the TiAlN films are deposited on high speed steel (HSS) through the hollow cathode deposition (HCD).The results show that the deposition technology is feasible,and that properties of the TiAlN films are excellent,i.e. its microhardness are high and the adhesion strength between film and matrix are better.The microstructure of TiAlN films are also analyzed in this paper. |
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| Keywords: | ion plating TIAlN manufacture structure and properties |
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