| Surface Modification of PVD-TiN Films Using MEVVAIon Implantation |
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| 作者姓名： | YANG Jian-hua' GONG Yun-guo' CHENG Ming-fei> ZHANG Tong-he . |
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| 作者单位： | YANG Jian-hua1'2，GONG Yun-guo1'2，CHENG Ming-fei1>2，ZHANG Tong-he3 1.Department of Physics，Nantong University，Jiangsu，China 2.Department of Physics，Nantong Institute of Technology，Jiangsu，China 3. Radiation Beam and Materials Engineering Lab，Beijing Normal University，Beijing，China |
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| 基金项目： | Science and Technology Engineering of Nantong Fund，南通工学院校科研和教改项目 |
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| 摘 要： | IN severe working and operating conditions tin filmsfabricated by conventional methods may also fail.Therefore,the investigations were towards furthersurface treatments,aiming at modifying the wearresistance of TiN films.Among the post surfacetreatment methods,MEVVA ion implantation hasshown to be particularly promising for surfacemodification|2l Some studies have shown that the wearand friction of implanted TiN films were improved afterMEVVA ion implantation,irrespective of the type ofi…
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Surface Modification of PVD-TiN Films Using MEVVAIon Implantation |
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| YANG Jian-hua'''',GONG Yun-guo'''',CHENG Ming-fei>,ZHANG Tong-he ..Surface Modification of PVD-TiN Films Using MEVVAIon Implantation[J].Transactions of Materials and Heat Treatment,2004,25(5). |
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| Authors: | YANG Jian-hua GONG Yun-guo CHENG Ming-fei ZHANG Tong-he |
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| Affiliation: | 1. Department of Physics, Nantong University, Jiangsu , China;Department of Physics, Nantong Institute of Technology, Jiangsu , China
2. Radiation Beam and Materials Engineering Lab, Beijing Normal University, Beijing, China |
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| Abstract: | Ti ion implantation was implanted into PVD-TiN films using a metal vapor vacuum arc (MEVVA) ion source with a low implantation dose and at a time-averaged ion beam current density of 25|O.A-cm'2. The wear characteristics of the implanted zone was measured and compared to the performance of unimplanted zone by a pin-on-disc apparatus and an optical interference microscope. The structure of the implanted zone and unimplanted zone was observed by X-ray photoelectron spectroscopy (XPS) and high voltage electron microscopy (HVEM). The wear mechanisms of the TiN film after ion implantation were discussed according to the results of XPS and HVEM. |
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| Keywords: | PVD-TiN MEVVA ion implantation surface Modification XPS HVEM |
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